| 000 | 00561nam a22001337a 4500 | ||
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| 005 | 20250313094407.0 | ||
| 008 | 250313b |||||||| |||| 00| 0 eng d | ||
| 020 | _a9780824724474 | ||
| 245 |
_aEngineering thin films and nanostructures with Ion Beams _c/edited by Emile Kaystautas _gxiv, 574p.;illl |
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| 250 | _cKnystautas, Emile | ||
| 260 |
_bCRC Press _c2019 _hBoca Raton, FL _i700583 _i700584 _lTA418.9.T45.En3 _mThin films _mNanostructures _mIon bombardment- Industrial application |
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| 500 | _ait includes references and index | ||
| 942 |
_alcc _cBK _eJohnson _f13/03/25 |
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| 999 |
_c2881 _d2881 |
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